• Temperature controlled rate table for optical imaging and semiconductor test on clean bench
  • Precision positioning system with 580mm table and 50kg capacity for heavy optical instruments
  • Close up of low magnetic leakage drive for <0.2mT field sensitive semiconductor testing
  • Rate table performing precision angle adjustment for laser alignment and wafer positioning
  • Test equipment dimensions on optical laboratory bench with anti magnetic shielding fixture
  • Automated control interface executing semiconductor wafer alignment sequence
  • Temperature controlled rate table for optical imaging and semiconductor test on clean bench
  • Precision positioning system with 580mm table and 50kg capacity for heavy optical instruments
  • Close up of low magnetic leakage drive for <0.2mT field sensitive semiconductor testing
  • Rate table performing precision angle adjustment for laser alignment and wafer positioning
  • Test equipment dimensions on optical laboratory bench with anti magnetic shielding fixture
  • Automated control interface executing semiconductor wafer alignment sequence

High-Precision Multifunctional Dual-Axis Electric Rate Table with Temperature Control for Optical Imaging, Inertial Navigation, and Semiconductor Testing

No.BE-INS2-24B33
This temperature controlled rate table serves as motion simulator and precision positioning system for optical imaging and semiconductor testing. 0.36″ angular resolution with <±5″ positioning accuracy ensures precise laser alignment and wafer positioning. 50kg load capacity with ∮580mm table supports heavy optical instruments. Ideal for telescope calibration, laser processing, wafer alignment, and medical imaging equipment adjustment.
Specifications
Load mounting table:
∮580mm
Maximum load weight:
50kg
Position accuracy:
< ±5″
Table flatness:
≤ 0.02 mm
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  • Temperature controlled rate table for optical imaging and semiconductor test on clean bench
  • Precision positioning system with 580mm table and 50kg capacity for heavy optical instruments
  • Close up of low magnetic leakage drive for <0.2mT field sensitive semiconductor testing
  • Rate table performing precision angle adjustment for laser alignment and wafer positioning
  • Test equipment dimensions on optical laboratory bench with anti magnetic shielding fixture
  • Automated control interface executing semiconductor wafer alignment sequence

Description

Technical Parameters
Equipment Specifications Table
Parameter Value
Load mounting table ϕ580 mm
Maximum load weight 50 kg
Table flatness ≤ 0.02 mm
Table end face runout ≤ 0.03 mm
Table leakage < 0.2 mT
Table mounting screw holes M8, 8 ray distribution or array distribution
Angular position positioning accuracy < ±5″
Angular position positioning repeatability ≤ ±3″
Rotation range 360° continuous rotation
Angular position measurement resolution 0.36
Rate range ±0.001°/s ∼ ±500°/s
Rate resolution 0.001°/s
Angular rate accuracy and rate stability ω < 1°/s, 3×10-3 (1° average);
1°/s ≤ ω < 10°/s, 3×10-4 (1° average);
ω ≥ 10°/s, 3×10-5 (360° average);
Maximum angular acceleration Inner frame 300°/s² (rated load);
Outer frame 100°/s² (rated load).