Precision testing meets production efficiency. This three-axis fixture is purpose-built for the demands of MEMS sensor manufacturing.
◆ Accuracy That Anchors Quality Control
±5 arc-second positioning accuracy with ±3 arc-second repeatability across all three axes ensures every MEMS sensor meets specification before leaving the production line. Orthogonality maintained within ±5 arc-seconds, with three-axis intersection within a Φ0.5 mm sphere.
◆ Boundless Rotation for Comprehensive Testing
360° continuous rotation on every axis eliminates mechanical stops, enabling uninterrupted multi-turn testing for complete sensor characterization without range limitations.
◆ Speed That Covers the Spectrum
Inner frame reaches 500°/s, middle frame 400°/s, outer frame 300°/s, with three-axis coordinated motion at 100°/s. Rate stability scales intelligently: 5×10⁻³ over 1° average, 5×10⁻⁴ over 10° average, and 5×10⁻⁵ over 360° average—delivering clean, artifact-free motion.
◆ Acceleration That Simulates Real-World Dynamics
Inner frame delivers 300°/s², middle frame 200°/s², outer frame 100°/s²—enough to replicate rapid attitude changes, vibration profiles, and dynamic disturbances for thorough MEMS performance evaluation.
◆ Precision Construction for Production Environments
Φ360 mm stainless steel table maintains 0.02 mm flatness and 0.02 mm face runout. M6 mounting holes with 25 mm pitch provide flexible fixture attachment for diverse MEMS device packages.
◆ Reliable Signal Transmission
30-channel slip ring with 14 single-core channels at 3A and 16 twisted-pair shielded lines at 2A ensures clean power and data transfer throughout continuous rotation—critical for in-process testing of active MEMS devices.
◆ Intelligent Automation for High Throughput
Computer-automated status control with real-time data acquisition, processing, and graphical display. RS232/RS422 interfaces enable seamless integration into existing production test systems.
◆ Compact and Production-Ready
At approximately 120 kg, this system offers laboratory-grade performance in a footprint designed for manufacturing environments. Reliable operation across -10°C to 35°C and ≤80% RH ensures consistent uptime.
◆ Applications
MEMS sensor in-process testing. Inertial measurement unit calibration. Gyroscope and accelerometer production validation. Precision instrument quality assurance. Research and development.
◆ The Production-Ready Testing Solution
This three-axis fixture proves that high precision and high throughput are not mutually exclusive. For manufacturers who need to validate every MEMS sensor with confidence—without slowing the production line—it delivers the accuracy, automation, and reliability that quality assurance demands.
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