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Three-Axis Rotary Test Fixture: Built for MEMS Production Testing

This three-axis rotary test fixture delivers ±5″ positioning accuracy with ±3″ repeatability and 360° continuous rotation. Featuring a Φ360 mm stainless steel table, 20 kg load capacity, inner rates up to 500°/s, and a 30-channel slip ring, it provides reliable in-process testing for MEMS sensors, inertial components, and precision instruments.
Jul 8th,2026 17 Views

In-process testing demands speed, accuracy, and zero compromise. This fixture delivers all three.

 Accuracy That Keeps Production Moving

±5 arc-second positioning accuracy and ±3 arc-second repeatability across all three axes. Orthogonality within ±5 arc-seconds, intersection within a Φ0.5 mm sphere. These aren't just numbers—they're the difference between passing and failing on the production line.

 Speed Without Sacrificing Stability

Inner frame spins at 500°/s, middle at 400°/s, outer at 300°/s. Three-axis coordinated motion at 100°/s ties them together. Rate stability scales cleanly: 5×10⁻³ over 1°, 5×10⁻⁴ over 10°, 5×10⁻⁵ over 360°—clean data at every speed.

 Acceleration That Simulates Real-World Dynamics

Inner frame delivers 300°/s², middle 200°/s², outer 100°/s². Enough to replicate the rapid attitude changes and disturbances that MEMS sensors face in actual operation.

 Continuous Rotation Without Limits

360° on all three axes—no stops, no resets. Multi-turn profiling and extended testing proceed without interruption.

 Stainless Steel Foundation

Φ360 mm table with 0.02 mm flatness and 0.02 mm face runout. M6 mounting holes on 25 mm pitch. Your devices sit on a stable, repeatable surface that doesn't drift between test runs.

 Signal Integrity Through Continuous Rotation

30-channel slip ring—14 single-core at 3A, 16 twisted-pair shielded at 2A. Power and data flow uninterrupted, even as the fixture rotates through multiple turns.

 Automated Control for High Throughput

Computer-based status control with real-time data acquisition, processing, and display. RS232/RS422 interfaces drop seamlessly into existing production test systems.

 Built for the Factory Floor

120 kg package. 220 V ±10% / 50 Hz power. Operates from -10°C to 35°C and up to 80% RH. No special infrastructure required—just consistent, reliable testing shift after shift.

 Where This Fixture Excels

MEMS sensor in-process validation. Inertial measurement unit calibration. Gyroscope and accelerometer production testing. Quality assurance on the line. R&D when you need to scale up.

 The Takeaway

This fixture is designed for one job: testing MEMS sensors with accuracy and speed, in the environment where it matters most—production. It delivers laboratory-grade precision without sacrificing throughput.

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